Design and Optimization of Ultrasonic Vibration Mechanism using PZT for Precision Laser Machining

As the aged population grows around the world, many medical instruments and devices have been developed recently. Among the devices, a drug delivery stent is a medical device which requires precision machining. Conventional drug delivery stent has problems of residual polymer and decoating because the drug is coated on the surface of stent with the polymer. If the drug is impregnated in the micro sized holes on the surface, the problems can be overcome because there is no need to use the polymer anymore. Micro sized holes are generally fabricated by laser machining; however, the fabricated holes do not have a high aspect ratio or a good surface finish. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head, the laser spot on the workpiece will vibrate vertically because objective lens in the eyepiece shakes by the mechanism's vibration. According to the former researches, the vibrating frequency over 20 kHz and amplitude over 500 nm are preferable. The vibration mechanism has cylindrical guide, hollowed PZT and supports. In the cylinder, the eyepiece is mounted. The cylindrical guide has upper and low plates and side wall. The shape of plates and side wall are designed to have high resonating frequency and large amplitude of motion. The PZT is also selected to have high actuating force and high speed of motion. The support has symmetrical and rigid configuration. The mechanism secures linear motion of the eyepiece. This research includes sensitivity analysis and design of ultrasonic vibration mechanism. As a result of design, the requirements of high frequency and large amplitude are achieved.