Article ID Journal Published Year Pages File Type
1872444 Physics Procedia 2011 4 Pages PDF
Abstract

It has been reported that light emission from semiconducting is enhanced by long time annealing. The enhancement of emission may be adapted to reduction of Si vacancy in . However, less sufficient evidence of the reduction of Si vacancy during annealing has been reported. In this study, we deduced concentration of Si vacancy in each depth as a function of annealing time from analysis of Rutherford backscattering random spectra.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Physics and Astronomy (General)