Fabrication of Sapphire Micro Optics by F2-Laser Ablation

F2-laser irradiation enables high precision ablation of sapphire. A mask projection system with high numerical aperture, equipped with an optical coherence tomography module for focus control, delivers submicron resolution. High fluences of up to 10 J/cm2 lead to smooth, crack free surfaces. Various micro-optical elements like fiber tip lenses, gratings, and diffractive optical elements can be manufactured this way.