Development of a small semiconductor detector using a printed circuit silicon-board for a personal dosemeter

We developed a small size silicon detector composed of a silicon radiation sensor, an analogue amplifier circuit and a sensor bias filter circuit by using a silicon circuit board for use in digital circuit applications. Our detector could be downsized by forming built-in electrical parts of small thin film on the silicon circuit board with a narrow wiring patterns of 20μm width through the Micro Electronics Mechanical System manufacturing process and by eliminating the ceramic case through the direct silicon sensor mounting. Our detector is -85%-85% smaller than the commercially available detector using the plastic circuit board that has the same sensor and the same circuit covered with a ceramic case. The physical characteristics, such as the energy response and the linearity to dose equivalent rate, of the newly developed detector were investigated by using Am241,Co57,Cs137,Co60 gamma-rays and 49–157 keV X-rays.