Article ID Journal Published Year Pages File Type
189495 Electrochimica Acta 2011 8 Pages PDF
Abstract

The ECM process with a moving cathode tool is simulated with the aim to study the influence of the temperature on the uniformity or copying quality of the removal rate. Two temperature dependent electrode reaction models are presented and used for solving the charge conservation and internal energy balance equations, in combination with the Navier–Stokes equations for viscous incompressible flow. The level set method is used for tracking the anode interface. The heat conduction through electrodes and the heat production by the electrode reactions are found to play an important role.

► We simulate temperature and shape variation of the workpiece in ECM. ► Heat generation in the electrical double layer is taken into account. ► Temperature dependent models for electrode reaction kinetics. ► Level set method combined with mesh deformation to track evolving workpiece surface. ► Convection and electrode conduction greatly affect the copying accuracy.

Related Topics
Physical Sciences and Engineering Chemical Engineering Chemical Engineering (General)
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