Fabrication of three-dimensional platinum microstructures with laser irradiation and electrochemical technique

Three-dimensional (3D) platinum microstructures were fabricated by successive procedures: aluminum anodizing, laser irradiation, nickel/platinum electroplating, and removal of the aluminum substrate, the oxide films, and the nickel metal layer. Aluminum plates and rods were anodized in an oxalic acid solution to form porous type oxide films. The anodized specimens were immersed in a nickel electroplating solution, and then irradiated with a pulsed Nd–yttrium aluminum garnet (YAG) laser beam to remove the anodic oxide film with a three-dimensional XYZθ stage. The specimens were cathodically polarized in the nickel and a platinum electroplating solution to form the metal micropattern at the laser-irradiated area. The electroplated specimens were immersed in NaOH solution to dissolve the aluminum substrate and the oxide films, and then immersed in HCl solution to dissolve the nickel deposits. A platinum grid-shaped microstructure, a microspring, and a cylindrical network microstructure with 50–100 μm line width were obtained successfully.