Sensor fusion for active vibration isolation in precision equipment

Sensor fusion is a promising control strategy to improve the performance of active vibration isolation systems that are used in precision equipment. Normally, those vibration isolation systems are only capable of realizing a low transmissibility. Additional objectives are to increase the damping ratio of internal vibration modes and to provide a high support stiffness. It is shown that these three objectives cannot be realized simultaneously if only acceleration or force feedback is used. An active hard mount suspension with a feedback strategy based on sensor fusion is proposed that uses the acceleration signal at low frequencies and the force signal at high frequencies. Using sensor fusion, the three objectives can be achieved simultaneously. Experiments on a single-axis setup show that this feedback strategy provides an excellent performance.

► Vibration isolation in precision equipment can be improved using sensor fusion. ► Acceleration feedback is used at low frequencies, force feedback at high frequencies. ► A stiff support is realized with an active hard mount suspension. ► A low transmissibility and a well damped internal mode are obtained simultaneously. ► Experiments on a single-axis setup show good agreement with simulations.