Semi-analytic solutions to nonlinear vibrations of microbeams under suddenly applied voltages

In this study, nonlinear oscillations of microbeams, actuated by suddenly applied electrostatic force, are investigated. Effects of electrostatic actuation, residual stress, midplane stretching and fringing fields are considered in modeling. Galerkin's decomposition method is utilized to convert the governing nonlinear partial differential equation to a nonlinear ordinary differential equation. Homotopy analysis method is used to find semi-analytic solutions to the vibrations of microbeams. Convergence regions of the solution series are determined. Influences of increasing the voltage and midplane stretching on the frequency of vibrations are also studied. Results are in good agreement with numerical and experimental findings.