Article ID Journal Published Year Pages File Type
4985562 Surfaces and Interfaces 2017 10 Pages PDF
Abstract
The use of scanning probe microscopy to acquire topographical information from surfaces with nanoscale features is now a common occurrence in scientific and engineering research. Image sizes can be orders of magnitude greater than the height of the features being analysed, and there is often a trade-off between image quality and acquisition time. This work investigates a commonly encountered problem in nanometrology - how to choose a scan size which is representative of the entire sample. The topographies of a variety of samples are investigated, including metals, polymers, and thin films.
Related Topics
Physical Sciences and Engineering Chemical Engineering Colloid and Surface Chemistry
Authors
, ,