A novel diamond-like carbon film

In this work, we fabricate a novel DLC film through shortening the deposition periods. The novel DLC film included F and Si doped multi-layer structure, and a silicon interlayer that is able to reduce internal stress, improve the bonding and adhesion, and bridge the film and substrate. This work mainly focused on discussing the cause of the corrosion behavior of the novel DLC film. Corrosion resistance is assessed by potentiodynamic polarization tests in 3.5 wt.% NaCl solution. The corrosion test results show that the novel DLC film exhibits good adhesion to Ti alloy substrate and good resistance to corrosion.