| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5005828 | Materials Science in Semiconductor Processing | 2017 | 8 Pages |
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
N.I. Klyui, V.Ya. Bratus, V.P. Temchenko, V.B. Lozinskii, V.O. Yukhymchuk, Wei Han, Bingbing Liu,