Article ID Journal Published Year Pages File Type
5005882 Materials Science in Semiconductor Processing 2017 5 Pages PDF
Abstract
The ionization and diffusion of metal atoms at metal/SiO2 interfaces under an electric field are studied by first-principles calculation. It is shown that the ionization of metal atoms occurs when the hybridization of metal-atom electronic states with metal-induced gap states (MIGS) is broken. Moreover, we show that an electric field markedly decreases the penetration barrier of metal atoms from a metal electrode into SiO2 and enhances the diffusion of metal atoms.
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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