Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5005882 | Materials Science in Semiconductor Processing | 2017 | 5 Pages |
Abstract
The ionization and diffusion of metal atoms at metal/SiO2 interfaces under an electric field are studied by first-principles calculation. It is shown that the ionization of metal atoms occurs when the hybridization of metal-atom electronic states with metal-induced gap states (MIGS) is broken. Moreover, we show that an electric field markedly decreases the penetration barrier of metal atoms from a metal electrode into SiO2 and enhances the diffusion of metal atoms.
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Authors
Yoshihiro Asayama, Masaaki Hiyama, Takashi Nakayama,