Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5005971 | Materials Science in Semiconductor Processing | 2017 | 5 Pages |
Abstract
This study focusses on the investigation of RF power variations (100-300Â W) effects on structural, morphological and optical properties of CaCu3Ti4O12 thin film deposited on ITO/glass substrate in a non-reactive atmosphere (Ar). The increase of RF power from 100Â W to 300Â W led to evolution of (112), (022), (033), and (224) of CCTO XRD peaks. The results indicated that all the films were polycrystalline nature with cubic structure. The crystallite size increased from 20Â nm to 25Â nm with increasing RF power. FESEM revealed that the films deposited were uniform, porous with granular form, while the grain size increased from 30 to 50Â nm. AFM analysis confirmed the increment in surface roughness from 1.6 to 2.3Â nm with increasing film grain size. Besides, optical transmittance values decreased to minimum 70% with increasing RF power while optical energy bandgap increased from 3.20Â eV to 3.44Â eV. Therefore, favorable CCTO thin film properties can be possibly obtained for certain application by controlling RF magnetron sputtering power.
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Authors
Mohsen Ahmadipour, Siti Nursalma Ayub, Mohd Fadzil Ain, Zainal Arifin Ahmad,