| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5005972 | Materials Science in Semiconductor Processing | 2017 | 8 Pages |
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Pavol Gemeiner, Nikola PeÅinka, ĽubomÃr Å vorc, Michal Hatala, LukáÅ¡ Gál, Michaela BeloviÄová, TomáÅ¡ Syrový, Milan Mikula,