Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5006148 | Materials Science in Semiconductor Processing | 2017 | 11 Pages |
Abstract
In this work, metallic bonding in GaN-based vertical light-emitting diode (VLED) is systematically characterized by using combined methodology of transmission Kikuchi diffraction (TKD) and energy dispersive X-ray spectroscopy (EDS) in a scanning electron microscope (SEM). SEM-based TKD with EDS identifies chemical composition, grain morphology, orientation, and phases at metallic bonding, while transmission electron microscopy (TEM) provides nanoscale characteristics of metallic diffusion bonding, and its interface-related defects and nano-twinned boundaries. Our results from SEM-TKD and TEM techniques provide unparalleled insight into the metallic bonding, and its future optimization.
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Authors
M.A. Khan, P.W. Trimby, H.W. Liu, R.K. Zheng,