| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5006212 | Materials Science in Semiconductor Processing | 2017 | 9 Pages |
Abstract
The original article can be found at 10.1016/j.mssp.2016.12.017 (volume 62, Page number 171-179).
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Henry Jr, Aaron G. Lind, Cory C. Bomberger, Yevgeniy Puzyrev, Joshua M.O. Zide, Sokrates T. Pantelides, Mark E. Law, Kevin S. Jones,