| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5006233 | Materials Science in Semiconductor Processing | 2017 | 9 Pages |
Related Topics
Physical Sciences and Engineering
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Electrical and Electronic Engineering
Authors
Zul Adlan Mohd Hir, Pourya Moradihamedani, Abdul Halim Abdullah, Mohamad Azuwa Mohamed,