Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5006382 | Measurement | 2017 | 7 Pages |
Abstract
Gas flow was measured by using constant volume-variable pressure method. The gas flow is measured by pressure rise method using spinning rotor gauge (SRG). The design is relatively simple and has no precisely movable parts compared to the constant pressure-variable volume method. Due to outgassing effect we used a non-evaporable getter pump in order to diminish the influence of hydrogen outgassing on measured gas flow. Lower limit of pressure rise method is 5 Ã 10â10 mbar l/s and this is extended to 3 Ã 10â12 mbar l/s by using constant conductance method. With this flow meter we generated a calibration pressure of Argon in our calibration system in the range from 8 Ã 10â13 mbar up to 2 Ã 10â7 mbar.
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Engineering
Control and Systems Engineering
Authors
Sefer Avdiaj, Janez Å etina,