Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5008029 | Sensors and Actuators A: Physical | 2017 | 6 Pages |
Abstract
This paper presents a multiprobe instrument for measuring the surface topography of microstructures. The instrument consists of a white light interference (WLI) microscope and an atomic force microscope (AFM), which work in conjunction with a precise positioning platform and can be switched freely by using a large-range kinematic axis mounted on the crossbeam of the supporting framework. To verify the performance of the instrument, a calibrated nanodimensional standard was measured. The results are given for the instrument and show good accuracy. To demonstrate the instrument's ease of use, a suspension spring in a microcapacitive sensor was measured and characterized by using the two probes interactively.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Junjie Wu, Guoqing Ding, Xin Chen, Tao Han, Yuan Li, Jiasi Wei,