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The effect of temperature gradient on the variation of surface topography and reflectivity of anisotropically etched silicon wafers

Article ID Journal Published Year Pages File Type
5008229 Sensors and Actuators A: Physical 2017 24 Pages PDF
Keywords
ReflectivitysiliconTemperature gradients
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Preview
The effect of temperature gradient on the variation of surface topography and reflectivity of anisotropically etched silicon wafers
Authors
Jan Kotěna, Antonín Minařík, Erik Wrzecionko, Petr Smolka, Magda Minaříková, Martin Minařík, AleÅ¡ Mráček, Ivo Kuřitka, Michal Machovský,
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Journal
Sensors and Actuators A: Physical
Journal: Sensors and Actuators A: Physical
Related Categories
Reflectivity
silicon
Temperature gradients
Analytical Chemistry
Chemistry (General)
Electrochemistry
Inorganic Chemistry
Organic Chemistry
Physical and Theoretical Chemistry
Spectroscopy
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