Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5008286 | Sensors and Actuators A: Physical | 2017 | 4 Pages |
Abstract
In this paper, a simple fabrication method for a Gaussian-shaped quartz crystal resonator was developed based on the surface tension of the photoresist. First, the photoresist profile on a quartz wafer was changed to a lens shape by the photoresist reflow. By changing the viscocity of the photoresist with propylene glycol monomethyl ether acetate, the photoresist profile on the quartz wafer was adjusted to create a Gaussian shape. Finally, the Gaussian-shaped QCR was fabricated by transferring the shape onto the quartz wafer using a reactive ion etching.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe,