Towards scalable capacitive cantilever arrays for emerging biomedical applications

This paper presents the design and implementation of a cantilever array device using a multi-user MEMS process for emerging point-of-care (PoC) diagnostic technologies. Each cantilever is incorporated with two capacitive sensing electrodes for the measurement of its beam deflection. A custom-made multichannel interface readout circuit was also developed using off-the-shelf elements for capacitance recording and data acquisition purposes. Herein, we demonstrate and discuss the functionality of the proposed capacitive cantilever array platform using interferometry and non-invasive rapid air-based characterization techniques. Based on simulation and experimental results, the proposed cantilever based platform can accurately measure μN-scale forces applied on each cantilever. The applicability of the proposed cantilever system was successfully investigated for PoC lung diagnostic purposes. Based on these results, the proposed system shows significant promise for use as an emerging free breathing measurement system for continuous assessment of respiratory health.