Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5008399 | Sensors and Actuators A: Physical | 2017 | 7 Pages |
Abstract
We study the nonlinear behavior of a microelectromechanical resonator implemented using the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response, two hysteretic cycles of different origin: mechanical and electrical. We observe that, by increasing the resonator DC voltage, the resonator goes from having a purely mechanical (hardening) nonlinear response to a purely electrical (softening) one, experiencing a mixed regime where mechanical and electrical nonlinearities coexist and partially compensate. We explain how the compensation between nonlinearities can be used to improve the phase noise of an MEMS-based oscillator. Specifically, we show that it is possible to operate the resonator at the top bifurcation point, while at the same time suppressing the amplitude-mediated frequency noise.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Guillermo Sobreviela, Gabriel Vidal-Álvarez, MartÃn Riverola, Arantxa Uranga, Francesc Torres, Núria Barniol,