Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5008573 | Sensors and Actuators A: Physical | 2016 | 21 Pages |
Abstract
We fabricated a functional micro-pump made of silicon and PZT thin films with standard MEMS technology. This pump can self-prime, works in both ways and pumps both air and water. Typical figures in water are 3.5 μL/min-flow rate at 1 Hz, no downstream pressure and 24 V-actuation voltage. At this voltage, the micro-pump valves withstand 32 mbar downstream pressure. The main advantage of this micro-pump based on piezoelectric films compared to its bulk counterparts is that it allows for low voltage operation. Less than 50 μW are needed to actuate the pump membranes at 1 Hz.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Pierre-Henri Cazorla, Olivier Fuchs, Martine Cochet, Sandrine Maubert, Gwenael Le Rhun, Yves Fouillet, Emmanuel Defay,