Modeling and control of threshold voltage based on pull-in characteristic for micro self-locked switch

Micro self-locked switches (MSS), where execution voltage corresponds to the output signal, are efficient and convenient platforms for sensor applications. The proper functioning of these sensing devices requires driving accurate displacement under execution voltage. In this work, we show how to control the actuating properties of MSSS. This switch comprises microstructures of various shapes with dimensions from 3.5 to 180 µm, which are optimized to encode a desired manufacture deviation by means of mathematical model of threshold voltage. Compared with pull-in voltage, threshold voltage is more easy to control the pull-in instability point by theoretical analysis. With the help of advanced manufacture technology, switch is processed in accordance with the proposed control method. Then, experimental results show that it is better, which have been validated by corresponding experiments. In addition, they can be known from experiments that the manufacturing technology is advanced and feasible, and its high resilience and stably self-locked function can achieve instantaneously sensing.