Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis

Today several techniques are available for micro-manufacturing. Yet, it is difficult to assess the precision and lateral X,Y accuracy of these techniques. The available accuracy information is usually based on specifications given by machine suppliers. This information is based on in-house laboratory tests performed by dedicated machine operators and within an adapted environment. In practice, the accuracy is likely to vary due to environmental conditions, materials and operator skills. In order to check the specifications in realistic environments the EUMINAfab infrastructure consortium initiated a set of independent high precision onsite verification tests on different laser micromachining installations. In addition to providing performance verification, it gave the participating partners real capability information of their equipment and possibilities to improve machining performance to a higher level. In this study a comprehensive verification test was designed and carried out by using a high precision metrology method for 2D measurements based on subpixel resolution image analysis. This methodology improved our knowledge of the capabilities of three laser micromachining installations, and showed that specifications at single micron levels are hard to obtain.