An analytical model for the prediction of temperature distribution and evolution in hybrid laser-waterjet micro-machining

•An analytical temperature field model in hybrid laser-waterjet machining is obtained.•The interaction among laser, waterjet and material is investigated.•3-D temperature profiles in silicon carbide during the hybrid process are established.•Comparison of laser dry ablation and the hybrid process are conducted.•The relationships between the temperatures and the parameters are illustrated.

A hybrid laser-waterjet micro-machining technology was developed for near damage-free micro-ablation recently. It uses a new material removal concept where the laser-softened material is expelled by a pressurised waterjet. The temperature field in this hybrid machining process is an essential quantity for understanding the underlying material removal mechanism and optimizing the process conditions. This study presents a three-dimensional (3-D) analytical model for the temperature field in this hybrid laser-waterjet micro-machining process. The interaction among the laser, waterjet, and workpiece is considered in the model. The absorption of laser by water, the formation of laser-induced plasma in water, the bubble formation and the laser refraction at the air-water interface are discussed. DuHamel's principle is used to determine a closed-form temperature equation and a solution in a variable separation form is obtained. A calculation for silicon carbide is conducted. The results are illustrated by a group of 3-D temperature profiles intuitively and visually. It is shown that the temperatures are below the melting point during the process due to the cooling action of waterjet. The almost damage-free micro-machining can be achieved. Besides, the maximum temperature increases with the increased average laser power and waterjet offset distance and decreased nozzle exit diameter where the average laser power takes a major action.