Investigation of plastic electrode tools for electrochemical machining of silicon

A concept of plastic electrode tools for electrochemical machining is investigated and applied to machining of c-Si. The electrode tools consist of a plastic body with an optimized electrical conductive coating. This concept allows for low cost electrodes which can be even realized by rapid prototyping techniques. The micro electrochemical machining of p-type silicon by these innovative metalized plastic electrode-tools is studied. The technological schemes of the machining and design of metalized plastic electrode-tools are developed. Theoretical investigation of thermal conditions and limitations of the electrode-tools during the machining process are performed. Based on these investigation, recommendations on the minimum thickness of the conductive layer of the electrode-tools from Cu, Ni and Pt are defined. Experimental optimization of the process parameters during the machining is performed and feasibility of the metalized plastic electrode-tools for micro electrochemical machining is demonstrated.