Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5019643 | Sensing and Bio-Sensing Research | 2017 | 5 Pages |
â¢RI sensor fabricated by grayscale lithography technique is demonstrated in this paper.â¢The tapered optical fiber is embedded in a closed microfluidic channel.â¢The RI measurement is done by tested the sensor with different concentration of NaCl.â¢The transmission spectra are shifted with different concentration of NaCl.â¢The RI sensor achieved a reliability and high sensitivity of 1457 nm/RIU.
A refractive index sensor was proposed by using 3 dimension (3D) grayscale lithography technique. Optical fiber with taper diameter of 12 μm was embedded in a closed microfluidic channel. Taper area of optical fiber is in floating condition at the center of micro channel. Grayscale variation range used for this sensor was 70%-74% and thickness variation 430 μm-694 μm was achieved. The dimension of the sensor was 7.5 cm in length and 2 cm in width. Fabricated sensor was characterized with air condition and solution concentration from 0.1 M to 1 M. A sensitivity of 1457 nm/RIU is achieved. The measured results show a good repeatability and low temperature cross-sensitivity.