Article ID Journal Published Year Pages File Type
5025390 Optik - International Journal for Light and Electron Optics 2017 7 Pages PDF
Abstract
There are several promising methods for photonic crystal (PhC) patterning of LED surfaces for improving the LED efficiency, i.e. the light out coupling. 2D patterns with different periods and various symmetries were fabricated using interference lithography (IL), non-contact near-field scanning optical microscopy (NSOM) lithography, and e-beam direct write (EBDW) lithography, respectively. The periodicity and quality of fabricated structures have been investigated using AFM and SEM imaging. Light extraction enhancement (LEE) was studied by measuring of the light-current (L-I) characteristics of untreated reference LEDs and patterned LEDs. The highest achieved LEE was measured for LEDs patterned by interference lithography.
Related Topics
Physical Sciences and Engineering Engineering Engineering (General)
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