Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5025910 | Optik - International Journal for Light and Electron Optics | 2017 | 5 Pages |
Abstract
Based on the Fourier heat conduction equation and the thermoelastic equation, the thermal-stress coupling model of the Si-CCD irradiated by millisecond pulse laser was established, the time-space distribution of the temperature field and the stress field on the Si-CCD was calculated. The results show that: the damage firstly occurred in the color filter layer; increased the laser energy density, part of the microlens and the color filters were missing; then continued to increase the laser energy density, the photosensitive area in the N-Si layer was melting; when the channels in the N-Si layer were damaged, the Si-CCD was under functional loss. In this paper, the simulation results were consistent with the experiment results.
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Authors
Mingxin Li, Guangyong Jin, Yong Tan,