| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5026566 | Procedia Engineering | 2017 | 6 Pages |
Abstract
A diffractive structure for the generation of high-frequency interference patterns of evanescent electromagnetic waves based on the interference of the “volume” modes of 1D dielectric photonic crystal at Fabry-Perot resonances is proposed. The obtained results may find application in the design of novel devices for near-field interference photolithography.
Related Topics
Physical Sciences and Engineering
Engineering
Engineering (General)
Authors
E.A. Kadomina, E.A. Bezus, L.L. Doskolovich,