Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5029364 | Procedia Engineering | 2016 | 4 Pages |
Abstract
Semiconductor gas sensors based upon n-type WO3 nanoparticle powder were fabricated and their response from 100 ppb to ppm levels of H2S in air has been investigated. In this study, a low power MEMS based micro-hotplate was employed as the substrate and operated at a constant temperature of 350ÌC. Experimental data demonstrate repeatable results across the range of concentrations. The devices have good response and recovery times and importantly excellent stability. Cross-sensitivities towards other reducing gases/VOCs showed that the WO3-based sensors are less sensitive to CO, acetone, H2 and CH4 even at much higher ppm levels.
Related Topics
Physical Sciences and Engineering
Engineering
Engineering (General)
Authors
B. Urasinska-Wojcik, T.A. Vincent, J.W. Gardner,