Sustainability Analysis of Silicon Nanowire Fabrication for High Performance Lithium Ion Battery Anode

Silicon nanowires (SiNWs) are synthesized by two-step metal-assisted chemical etching (MACE) using different etching parameters including AgNO3 concentrations (5/20/50 mM) and H2O2 concentrations (0.03/0.1/0.3 M). Diameter distributions of synthesized SiNWs with different parameters are analyzed. Gas emissions and nanoparticle wastes in SiNWs synthesis process are theoretically calculated and experimentally tested. The effects of etching parameters on etching rate are investigated.Fig. A.. Gas emissions with different etching conditions. (a) H2O2 0.3 M with variable AgNO3 concentrations (5/20/50 mM); (b) AgNO3 20 mM with variable H2O2 concentrations (0.03/0.1/0.3 M).