Electrical conductivity of RF-sputtered Gd-doped ceria film measured in across-plane mode

Gd-doped ceria (GDC, Ce0.86Gd0.14O2 − δ) films are deposited on conductive substrates by RF-magnetron sputtering and their across-plane electrical conductivities (perpendicular to film plane) are measured as a function of temperature (300 ≤ T ≤ 400 °C) and oxygen partial pressure (Po2) to assess the feasibility of their use as an electrolyte in miniaturized solid oxide fuel cells (micro-SOFCs). The films deposited at relatively high T = 500 °C, deposited on either dense or porous substrate, show columnar grains with diameter 200 nm. The magnitude of conductivities in air is similar to those of pellet-form GDC. However, the electronic conductivities of GDC films in low Po2 are higher than that of pellet.