| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5152943 | Journal of Organometallic Chemistry | 2017 | 9 Pages |
Abstract
Monomeric zirconium and hafnium complexes of the formula M(RNC(O)Râ²) were obtained upon treatment of tetrakis(dimethylamido)zirconium or tetrakis(dimethylamido)hafnium with four equivalents of secondary organic amides. These complexes combine good volatility and high thermal stability, and are promising candidates for metal oxide thin film growth precursors.129
Related Topics
Physical Sciences and Engineering
Chemistry
Inorganic Chemistry
Authors
Mahesh C. Karunarathne, Joseph W. Baumann, Mary Jane Heeg, Philip D. Martin, Charles H. Winter,