Methacrylate-based polymer films useful in lithographic applications exhibit different glass transition temperature-confinement effects at high and low molecular weight

Article ID	Journal	Published Year	Pages	File Type
5181455	Polymer	2014	10 Pages	PDF

Keywords

Confinement effects glass transition temperature Polymer thin films

Related Topics

Physical Sciences and Engineering Chemistry Organic Chemistry

Methacrylate-based polymer films useful in lithographic applications exhibit different glass transition temperature-confinement effects at high and low molecular weight

Authors

Tian Lan, John M. Torkelson,