| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5186339 | Polymer | 2006 | 4 Pages |
Abstract
A novel negative photoinitiator-free photosensitive polyimide (PFPS-PI) was synthesized through introducing the photosensitive 4,4-bis[(4-amino)thiophenyl] benzophenone (BATPB) into backbone chain and methyl acrylate group into side-chain of the polyimide, respectively. Photosensitive properties study revealed its good photolithographic properties, with a resolution about 5 μm and a sensitivity of 150 mJ/cm2.
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Physical Sciences and Engineering
Chemistry
Organic Chemistry
Authors
Xuesong Jiang, Hao Li, Hongyu Wang, Zixing Shi, Jie Yin,