Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5346804 | Applied Surface Science | 2018 | 6 Pages |
Abstract
Nano-gaps are fundamental building blocks for nanochannels, plasmonic nanostructures and superconducting Josephson junctions. We present a systematic study on the formation mechanism and resolution limit of W-C nano-gaps fabricated using focused-ion-beam chemical vapour deposition (FIB-CVD). First, the deposition size of the nanostructures is evaluated. The size averaged over 100 dots is 32Â nm at FWHM. Line and space are also fabricated with the smallest size, having a spacing of only 5Â nm at FWHM. Then, a model is developed to study the formation mechanism and provides the design basis for W-C nano-gaps. Both experimental and simulation results reveal that the shrinkage of W-C nano-gaps is accelerated as the Gaussian parts of the nano-wire profiles overlap. A Nano-gap with a length of 5Â nm and height difference as high as 42Â nm is synthesized. We believe that FIB-CVD opens avenues for novel functional nanodevices that can be potentially used for biosensing, photodetecting, or quantum computing.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Jun Dai, Hui Chang, Etsuo Maeda, Shin'ichi Warisawa, Reo Kometani,