Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5346836 | Applied Surface Science | 2018 | 22 Pages |
Abstract
In the paper, we propose an XPS-based quantitative method for depth profile analysis of chemical and phase composition of multi-component and multi-layer samples. The method includes: (1) new method for background subtraction accounting for depth non-uniformity of electron energy losses; (2) new method for photoelectron line decomposition into elementary peaks, which accounts for physical nature of the decomposition parameters; (3) joint solving of both background subtraction and photoelectron line decomposition problems; (4) criterion for assessing of line decomposition accuracy; (5) simple formula for layer thickness extraction for multi-element and multi-layer sample. We apply the developed method for analysis of multilayer niobium oxide and sub-oxide films before and in course of ion milling.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Alexander V. Lubenchenko, Alexander A. Batrakov, Alexey B. Pavolotsky, Olga I. Lubenchenko, Dmitriy A. Ivanov,