Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5346969 | Applied Surface Science | 2017 | 11 Pages |
Abstract
Surface structuring of titanium oxide thin films by a UV femtosecond laser beam (266Â nm, 100Â fs) is presented in this paper. Without using laser scanning, the results show the formation of regular dots and laser induced periodic surface structures (LIPSS) with a period close to that of the beam wavelength. These nanostructures seem to be due to free-surface energy minimization. Furthermore, laser irradiation of large homogeneous surfaces by laser scan (5Â ÃÂ 5Â mm2) showed more exotic surface morphologies, ranging from regular dots and low spatial frequency LIPSS to microstructures that are completely controlled by the laser fluence and the number of shots. Typically 2D circular dots of 100Â nm diameter with two distinct periods (260 and 130Â nm) are achieved under a very low fluence of 15Â mJ/cm2 after 13000 shots.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
A. Talbi, C. Tchiffo Tameko, A. Stolz, E. Millon, C. Boulmer-Leborgne, N. Semmar,