| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5347342 | Applied Surface Science | 2017 | 7 Pages |
Abstract
In this context, we present results of detailed chemical interface analysis of sputtered TaN and TiN thin films as potential barrier layers onto SAW-substrate material (LiNbO3) with respect to their temporal (up to 8 h) and thermal stability up to 600 °C in vacuum. We report good stability of both systems. The main technique for analysis was non-destructive and surface sensitive angle-resolved X-ray photoelectron spectroscopy (AR-XPS).
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Authors
U. Vogel, S. Oswald, J. Eckert,