Comparison of structural, mechanical and corrosion properties of TiO2-WO3 mixed oxide films deposited on TiAlV surface by electron beam evaporation

The results obtained show that the layer with the highest content of tungsten - (Ti0.41W0.59)Ox is characterized by the best mechanical and corrosion properties from all tested samples. The hardness obtained for this sample was equal to 3.20 GPa, and was similar to the value obtained for undoped TiO2 thin film. In addition, the value of corrosion current density for this sample was equal to 3.6∙10−8 A/cm2, and was similar to the value obtained for pure WO3 thin film.