Numerical investigation of sputtering power effect on nano-tribological properties of tantalum-nitride film using molecular dynamics simulation

- Surface roughness variation reaches to a minimum with increasing power density and then starts to increase.
- Increasing deposition rate leads to harder surface diffusion and less kinetic energy.
- Increasing the incident energy increases the kinetic energy and hence reduces surface diffusion.
- Harder surface diffusion and less kinetic energy of atoms cause the surface to roughen.