| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5348051 | Applied Surface Science | 2016 | 11 Pages |
Abstract
Surface engineering of high aspect ratio silicon structures.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
M. Leber, M.M.H. Shandhi, A. Hogan, F. Solzbacher, R. Bhandari, S. Negi,