| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5348132 | Applied Surface Science | 2016 | 6 Pages |
Abstract
- Sonochemistry makes the Pd activation with Pd size of 1-3Â nm possible on Ta barrier substrate.
- NH4OH improves uniformity and the adhesion of Pd nano-particles on substrate.
- N2 purging changes the solvent atmosphere for Pd nano-particle formation.
- Cu film quality was improved by aging activation solution and purging activation solution with N2.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Kanghoon Kim, Seonok Jin, Oh Joong Kwon,