Investigation of interdiffusion and depth resolution in Cu/Ni multilayers by means of AES depth profiling

Article ID	Journal	Published Year	Pages	File Type
5348197	Applied Surface Science	2016	21 Pages	PDF

Abstract

- The interdiffusion coefficient of Cu/Ni multilayer was extracted using the Mixing-Roughness-Information (MRI) model.
- The depth-dependent interdiffusion coefficients were quantitatively evaluated.
- Diffusion length as small as a nanometer scale could be measured using MRI model.
- The depth-dependent depth resolutions were quantitatively evaluated.

Keywords

MRI model Depth resolution Interdiffusion coefficient AES depth profiling

Related Topics

Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry

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Investigation of interdiffusion and depth resolution in Cu/Ni multilayers by means of AES depth profiling

Authors

X.L. Yan, Y. Liu, H.C. Swart, J.Y. Wang, J.J. Terblans,