| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5348663 | Applied Surface Science | 2016 | 7 Pages |
Abstract
- The EEMD based pitch evaluation method with better applicability is proposed.
- EEMD based method could improve pitch precision and grating line position precision.
- AFM nonlinearity was stable, and smaller in x axis and forward scanning.
- A detailed pitch uncertainty evaluation model for commercial AFMs is demonstrated.
- The grating pitch uncertainty was reduced about 10% by EEMD.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Changsheng Li, Shuming Yang, Chenying Wang, Zhuangde Jiang,