Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5348837 | Applied Surface Science | 2015 | 29 Pages |
Abstract
The high stress of diamond-like carbon (DLC) film limits its thickness and adhesion on substrate. Multilayer structure is one approach to overcome this disadvantage. In this paper, the DLC/TiC multilayer films with different modulation periods (80Â nm, 106Â nm or 160Â nm) at same modulation ratio of 1:1 were deposited on Si(1Â 0Â 0) wafer and Ti-6Al-4V substrate by filtered cathodic vacuum arc (FCVA) technology. X-ray diffraction (XRD), transmission electron microscopy (TEM), nanoindention and wear test were employed to investigate the effect of modulation periods on the microstructure and mechanical properties of the multilayer films. The results showed that the residual stress of the DLC/TiC multilayer films could be effectively reduced and the residual stress decreased with the modulation periods decreasing. The hardness of the DLC/TiC multilayer films increased with modulation periods decreasing. The DLC/TiC multilayer film with modulation period of 106Â nm had the best wear resistance due to the good combination of hardness, ductility and low compressive stress.
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Authors
Zhaoying Xu, H. Sun, Y.X. Leng, Xueyuan Li, Wenmao Yang, N. Huang,