Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5349254 | Applied Surface Science | 2018 | 18 Pages |
Abstract
Fast selective pattering with high precession on 175Â nm ITO thin film with IR ps lasers is investigated. Ablation parameters are optimized with detailed studies on the scribed depth, topography, and particle generation using AFM and SEM. A comparison of 10 and 150Â ps laser revealed that the shorter pulse (10Â ps) laser is more appropriate in selective and partial ablation; up to 20Â nm resolution for controlled depth with multipulses having energy below the damage threshold is demonstrated. The experimental results are interpreted to involve stress assisted ablation mechanism for the 10Â ps laser while thermal ablation along with intense melting occurs for 150Â ps laser. The transition between these regimes is estimated to occur at approximately 30Â ps.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Nazar Farid, Helios Chan, David Milne, Adam Brunton, Gerard M. O'Connor,